Ein Referenzwerk von Autoren aus Wissenschaft und Forschung mit engen Verbindungen zur Industrie vereint Aspekte der Material- und Computerwissenschaften und des Engineering zu einem einheitlichen Blick auf vielversprechende Ansätze für materialintegrierte intelligente Systeme.
Foreword XV
Preface XIX
Part One Introduction 1
1 On Concepts and Challenges of Realizing Material-Integrated Intelligent Systems 3
Stefan Bosse and Dirk Lehmhus
1.1 Introduction 3
1.2 System Development Methodologies and Tools (Part Two) 7
1.3 Sensor Technologies and Material Integration (Part Three and Four) 8
1.4 Signal and Data Processing (Part Five) 15
1.5 Networking and Communication (Part Six) 17
1.6 Energy Supply and Management (Part Seven) 21
1.7 Applications (Part Eight) 21
References 24
Part Two System Development 29
2 Design Methodology for Intelligent Technical Systems 31
Mareen Vaßholz, Roman Dumitrescu, and Jürgen Gausemeier
2.1 From Mechatronics to Intelligent Technical Systems 32
2.2 Self-Optimizing Systems 36
2.3 Design Methodology for Intelligent Technical Systems 38
2.3.1 Domain-Spanning Conceptual Design 41
2.3.2 Domain-Specific Conceptual Design 50
References 51
3 Smart Systems Design Methodologies and Tools 55
Nicola Bombieri, Franco Fummi, Giuliana Gangemi, Michelangelo Grosso,
Enrico Macii, Massimo Poncino, and Salvatore Rinaudo
3.1 Introduction 55
3.2 Smart Electronic Systems and Their Design Challenges 56
3.3 The Smart Systems Codesign before SMAC 57
3.4 The SMAC Platform 60
3.4.1 The Platform Overview 61
3.4.1.1 System CSystemVue Cosimulation 61
3.4.1.2 ADS and the Thermal Simulation 63
3.4.1.3 EMPro Extension and ADS Integration 64
3.4.1.4 Automated EM Circuit Cosimulation in ADS 64
3.4.1.5 HIF Suite Toolsuite 65
3.4.1.6 The MEMS+ Platform 66
3.4.2 The (Co)Simulation Levels and the DesignDomains Matrix 67
3.5 Case Study: A Sensor Node for Drift-Free Limb Tracking 69
3.5.1 System Architecture 71
3.5.2 Model Development and System-Level Simulation 71
3.5.3 Results 73
3.6 Conclusions 76
Acknowledgments 77
References 77
Part Three Sensor Technologies 81
4 Microelectromechanical Systems (MEMS) 83
Li Yunjia
4.1 Introduction 83
4.1.1 What Is MEMS 83
4.1.2 Why MEMS 84
4.1.3 MEMS Sensors 84
4.1.4 Goal of This Chapter 85
4.2 Materials 85
4.2.1 Silicon 85
4.2.2 Dielectrics 86
4.2.3 Metals 87
4.3 Microfabrication Technologies 87
4.3.1 Silicon Wafers 87
4.3.2 Lithography 88
4.3.3 Etching 91
4.3.4 Deposition Techniques 93
4.3.5 Other Processes 94
4.3.6 Surface and Bulk Micromachining 95
4.4 MEMS Sensor 95
4.4.1 Resistive Sensors 95
4.4.2 Capacitive Sensors 99
4.5 Sensor Systems 103
References 104
5 Fiber-Optic Sensors 107
Yi Yang, Kevin Chen, and Nikhil Gupta
5.1 Introduction to Fiber-Optic Sensors 107
5.1.1 Sensing Principles 108
5.1.2 Types of Optical Fibers 108
5.2 Trends in Sensor Fabrication and Miniaturization 110
5.3 Fiber-Optic Sensors for Structural Health Monitoring 112
5.3.1 Sensors for Cure Monitoring of Composites 114
5.3.2 Embedded FOS in Composite Materials 114
5.3.3 Surface-Mounted FOS in Composite Materials 115
5.3.4 FOS for Structural Monitoring 115
5.3.4.1 Aerospace Structures 115
5.3.4.2 Civil Structures 116
5.3.4.3 Marine Structures 116
5.4 Frequency Modulation Sensors 117
5.4.1 Bragg Grating Sensors 117
5.4.2 FabryPérot Interferometer Sensor 118
5.4.3 Whispering Gallery Mode Sensors 119
5.5 Intensity Modulation Sensors 122
5.5.1 Fiber Microbend Sensors 122
5.5.2 Fiber-Optic Loop Sensor ...